Fundamental Principles of Optical Lithography: The Science of Microfabrication

I got Chris Mack to sign my copy. Geert wouldn't let the Imec staff sign it as a goodbye present though. :(

This book changed my life. I was poor, living in a dumpster and ignorant about the principles of optical lithography - and then I found this book. Now, I have a successful career and am a much happier person. Whatever you do, wherever you go, buy this book!

If you do any kind of modeling in the semiconductor industry related to photolithography, you should have this book on your desk. It will become worn, torn, marked, and scarred after a decade of use, but that is why it's there.It's more of a "theoretical lithography" book in the sense that various ideas that are expressed in words in other lithography books are mapped to their underlying mathematical optical, physical, and chemical models in this book. Because of this, this book is a prerequisite for doing computational lithography.This book might also be useful to people interested in practical applications of Fourier Optics and light-sensitive materials. The chapter on lithographic control would be useful to anyone working in a chip manufacturing fab.The writing style is clear and the subject matter well-organized.

This book was a life saver as far as a reference for my research!

A bible, my life saver. Best book on lithography for both experts and starters. Thank you Chris!tip: also watch the youtube series from Chris Mack on lithography and chemical processes.

Working in the semiconductor industry, a coworker was looking for this book and I bought it as a Christmas gift.